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1. (WO2016051588) SPATIAL-STRUCTURE OBSERVATION/PROCESSING METHOD AND APPARATUS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2016/051588 International Application No.: PCT/JP2014/076550
Publication Date: 07.04.2016 International Filing Date: 03.10.2014
IPC:
H01J 37/26 (2006.01) ,H01J 37/20 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26
Electron or ion microscopes; Electron- or ion-diffraction tubes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
20
Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Applicants: HITACHI, LTD.[JP/JP]; 6-6, Marunouchi 1-chome, Chiyoda-ku, Tokyo 1008280, JP
Inventors: HARADA Ken; JP
ONO Shiano; JP
Agent: POLAIRE I.P.C.; 7-1, Hatchobori 2-chome, Chuo-ku, Tokyo 1040032, JP
Priority Data:
Title (EN) SPATIAL-STRUCTURE OBSERVATION/PROCESSING METHOD AND APPARATUS
(FR) PROCÉDÉ ET APPAREIL D'OBSERVATION/TRAITEMENT DE STRUCTURE SPATIALE
(JA) 立体構造観察・加工方法、及び装置
Abstract:
(EN) The present invention provides a stereoscopic-image observation/processing technique having a desired quantitative level and capable of observation and data analysis in a short period of time. This spatial-structure observation/processing method, using a charged-particle beam apparatus, comprises: rotating a specimen held in a specimen holder of the apparatus in approximately 120° steps to three angular positions about a rotation axis 22 defined as a direction tilted by approximately 54.7° relative to an optical axis 2 of the apparatus; and performing spatial-structure observation or processing of the specimen disposed at an intersection 21 from three directions orthogonal to one another.
(FR) La présente invention concerne une technique d'observation/traitement d'image stéréoscopique ayant un niveau quantitatif désiré et capable d'observation et d'analyse de données dans une courte période. Le procédé selon l'invention d'observation/traitement de structure spatiale en utilisant un appareil à faisceau de particules chargées, comprend : mise en rotation d'un échantillon maintenu dans un porte-échantillon de l'appareil par pas d'environ 120° à trois positions angulaires autour d'un axe de rotation (22) défini comme une direction inclinée d'environ 54,7° par rapport à un axe optique (2) de l'appareil; et réalisation d'une observation ou d'un traitement de la structure spatiale de l'échantillon disposé à une intersection (21) des trois directions orthogonales les unes aux autres.
(JA)  所望の定量性を備え、短時間で観察とデータ解析できる立体像観察・加工技術を提供する。 荷電粒子線装置による立体構造観察・加工方法として、装置の試料ホルダに保持された試料を、装置の光軸2と約54.7度に傾斜した方位を回転軸22として、略120度ずつ3通りの角度に回転させ、交点21に配置させる試料を直交する3方向からそれぞれ立体構造観察、あるいは加工を行う。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)