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1. (WO2015199539) PLASMA SOURCE AND SURFACE TREATMENT METHOD



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/NL2015/050463 P104684PC00
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
25 June 2015 25 June 2014
Applicant
NEDERLANDSE ORGANISATIE VOOR...
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing filed or furnished:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
This International Searching Authority found multiple inventions in this international application, as follows:
1. claims: 1-14
Plasma source comprising dielectric and/or electrically conductive ridges between the second surface of the first electrode and the dielectric layer that covers at least part of the second electrode, i.e. running through the plasma initiation space.
2. claim: 15
Particular plasma source configuration whereby said plasma source may be used in an atomic layer deposition method
3. claim: 16
Plasma surface treatment method using a plasma source and comprising the step of supplying a first and a second gas flow, each comprising a respective different precursor through a first and a second plasma initiation space respectively.
1.
As all required additional search fees were timely paid by the applicant, this international search report covers all searchable claims.
2.
As all searchable claims could be searched without effort justifying additional fees, this Authority did not invite payment of additional fees.
3.
As only some of the required additional search fees were timely paid by the applicant, this international search report covers only those claims for which fees were paid, specifically claims Nos.:
4.
No required additional search fees were timely paid by the applicant. Consequently, this international search report is restricted to the invention first mentioned in the claims; it is covered by claims Nos.: 1-14
Remark on Protest
The additional search fees were accompanied by the applicant’s protest and, where applicable, the payment of a protest fee.
The additional search fees were accompanied by the applicant’s protest but the applicable protest fee was not paid within the time limit specified in the invitation.
No protest accompanied the payment of additional search fees.
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
PLASMA SOURCE AND SURFACE TREATMENT METHOD

5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.

Plasma source and surface treatment method. A plasma source has an outer surface (12), interrupted by an aperture (14) for delivering an atmospheric plasma from the outer surface. A transport mechanism (11) transports a substrate (10) in parallel with the outer surface, closely to the outer surface, so that gas from the atmospheric plasma may form a gas bearing between the outer surface the and the substrate. A first electrode (16a,b) of the plasma source has a first and second surface extending from an edge of the first electrode that runs along the aperture. The first surface defines the outer surface on a first side of the aperture. The distance between the first and second surface increasing with distance from the edge. A second electrode (17) covered at least partly by a dielectric layer (18) is provided with the dielectric layer facing the second surface of the first electrode, substantially in parallel with the second surface of the first electrode, leaving a plasma initiation space on said first side of the aperture, between the surface of the dielectric layer and the second surface of the first electrode. A gas inlet (19a,b) feeds into the plasma initiation space to provide gas flow from the gas inlet to the aperture through the plasma initiation space. Atmospheric plasma initiated in the plasma initiation space flows to the aperture, from which it leaves to react with the surface of the substrate.


6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     1    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     C23C 16/455 (2006.01)i; C23C 16/513 (2006.01)i; H01J 37/32 (2006.01)i; H05H 1/24 (2006.01)i; H01L 21/314 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     C23C; H01J; H05H; H01L
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
EPO-Internal, WPI Data, COMPENDEX, IBM-TDB

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
WO 2008038901 A1 (CMTECH CO LTD [KR]; MIN HUNG SIK [KR]; AN YOUNG GEUN [KR]; YANG SUNG J) 03 April 2008 (2008-04-03)
1,2,7-9,13,14
abstract; figures 4-7
paragraphs [0001], [0034] - [0042], [0046] - [0062], [0070]
(2)
X
JP 2002018276 A (PEARL KOGYO KK) 22 January 2002 (2002-01-22)
1,2,7-9,13,14
abstract; figures 3,4,7
paragraphs [0001], [0002], [0006], [0015] - [0022]
(3)
X
EP 2666544 A1 (VITO NV [BE]) 27 November 2013 (2013-11-27)
1,2,7-9,13,14
abstract; figure 1B
paragraphs [0002], [0032], [0039] - [0053], [0059], [0090], [0097] - [0100]
(4)
A
EP 2362411 A1 (TNO [NL]) 31 August 2011 (2011-08-31)
1,8
abstract; figures 1,5,8A, 8B
paragraphs [0001], [0013], [0014], [0018] - [0023], [0033] - [0038], [0042], [0043], [0045], [0049], [0053], [0058]
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
WO 2008038901 A1
03 April 2008
NONE
JP 2002018276 A
22 January 2002
NONE
EP 2666544 A1
27 November 2013
EP 2666544 A1
US 2013313480 A1
27 November 2013
28 November 2013
EP 2362411 A1
31 August 2011
CN 102859647 A
EP 2362411 A1
EP 2539921 A1
KR 20130028070 A
TW 201133612 A
US 2013118895 A1
WO 2011105908 A1
02 January 2013
31 August 2011
02 January 2013
18 March 2013
01 October 2011
16 May 2013
01 September 2011
Name and mailing address of the ISA/:
European Patent Office
P.B. 5818, Patentlaan 2, 2280 HV Rijswijk,
Netherlands
Telephone No. (+31-70)340-2040
Facsimile No. (+31-70)340-3016
Date of the actual completion of the international search:
18 August 2015
Date of mailing of the international search report:
16 November 2015
Authorized officer:
Remy, Jérôme
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