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1. (WO2015125827) PULSED LIGHT GENERATION METHOD, PULSED LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE PROVIDED WITH PULSED LASER DEVICE

Pub. No.:    WO/2015/125827    International Application No.:    PCT/JP2015/054451
Publication Date: Fri Aug 28 01:59:59 CEST 2015 International Filing Date: Thu Feb 19 00:59:59 CET 2015
IPC: G02F 1/03
G02F 1/37
G03F 7/20
H01L 21/027
H01S 3/00
H01S 3/10
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: INABA, Naoto
稲葉 直人
TOKUHISA, Akira
徳久 章
Title: PULSED LIGHT GENERATION METHOD, PULSED LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE PROVIDED WITH PULSED LASER DEVICE
Abstract:
A pulsed light generation method that generates pulsed light by using an intensity-modulating electro-optical modulator to chop laser light that is output from a laser light source. The pulsed light generation method generates pulsed light by driving the electro-optical modulator using a drive signal that changes the voltage applied to the electro-optical modulator between a voltage that is lower than a reference voltage and a voltage that is higher than the reference voltage, the reference voltage being the voltage that is applied to the electro-optical modulator when the transmittance of the laser light transmitted through the electro-optical modulator is at a maximum.