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|1. (WO2015125827) PULSED LIGHT GENERATION METHOD, PULSED LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE PROVIDED WITH PULSED LASER DEVICE|
|Title:||PULSED LIGHT GENERATION METHOD, PULSED LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE PROVIDED WITH PULSED LASER DEVICE|
A pulsed light generation method that generates pulsed light by using an intensity-modulating electro-optical modulator to chop laser light that is output from a laser light source. The pulsed light generation method generates pulsed light by driving the electro-optical modulator using a drive signal that changes the voltage applied to the electro-optical modulator between a voltage that is lower than a reference voltage and a voltage that is higher than the reference voltage, the reference voltage being the voltage that is applied to the electro-optical modulator when the transmittance of the laser light transmitted through the electro-optical modulator is at a maximum.