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1. (WO2015125520) FERROELECTRIC THIN FILM, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, INKJET PRINTER AND METHOD FOR PRODUCING FERROELECTRIC THIN FILM
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2015/125520 International Application No.: PCT/JP2015/050861
Publication Date: 27.08.2015 International Filing Date: 15.01.2015
IPC:
H01L 41/187 (2006.01) ,B41J 2/14 (2006.01) ,C01G 25/00 (2006.01) ,C23C 14/08 (2006.01) ,H01L 21/316 (2006.01) ,H01L 41/09 (2006.01) ,H01L 41/316 (2013.01) ,H01L 41/319 (2013.01)
Applicants: KONICA MINOLTA , INC.[JP/JP]; 2-7-2, Marunouchi, Chiyoda-Ku, Tokyo 1007015, JP
Inventors: MAWATARI Kenji; JP
Agent: SANO PATENT OFFICE; 5F, Tenmabashi-Yachiyo Bldg. Bekkan, 2-6, Tenmabashi-Kyomachi, Chuo-Ku, Osaka-Shi, Osaka 5400032, JP
Priority Data:
2014-02920919.02.2014JP
Title (EN) FERROELECTRIC THIN FILM, SUBSTRATE WITH PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ACTUATOR, INKJET HEAD, INKJET PRINTER AND METHOD FOR PRODUCING FERROELECTRIC THIN FILM
(FR) PELLICULE MINCE FERROÉLECTRIQUE, SUBSTRAT À PELLICULE MINCE PIÉZOÉLECTRIQUE, ACTIONNEUR PIÉZOÉLECTRIQUE, TÊTE DE JET D'ENCRE, IMPRIMANTE À JET D'ENCRE ET PROCÉDÉ DE PRODUCTION DE PELLICULE MINCE FERROÉLECTRIQUE
(JA) 強誘電体薄膜、圧電薄膜付き基板、圧電アクチュエータ、インクジェットヘッド、インクジェットプリンタおよび強誘電体薄膜の製造方法
Abstract: front page image
(EN) This ferroelectric thin film is formed from lead lanthanum zirconate titanate. In this ferroelectric thin film, the ratio (a) of lanthanum relative to the sum of lead and lanthanum is from 6% to 8% (inclusive) on a molar basis, and the ratio (b) of zirconium relative to the sum of zirconium and titanium is from 54% to 59% (inclusive) on a molar basis.
(FR) La présente invention concerne une pellicule mince ferroélectrique qui est constituée de zirconate-titanate de plomb et de lanthane. Dans cette pellicule mince ferroélectrique, le ratio (a) de lanthane par rapport à la somme de plomb et de lanthane est compris entre 6 % et 8 % (inclus) sur une base molaire, et le ratio (b) de zirconium par rapport à la somme de zirconium et de titane est compris entre 54 % et 59 % (inclus) sur une base molaire.
(JA)  強誘電体薄膜は、チタン酸ジルコン酸ランタン鉛からなる。上記強誘電体薄膜において、鉛とランタンとの総和に対するランタンの比率aが、モル比で6%以上8%以下であり、ジルコニウムとチタンとの総和に対するジルコニウムの比率bが、モル比で54%以上59%以下である。
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)