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1. (WO2015125286) LASER CHAMBER

Pub. No.:    WO/2015/125286    International Application No.:    PCT/JP2014/054230
Publication Date: Fri Aug 28 01:59:59 CEST 2015 International Filing Date: Sat Feb 22 00:59:59 CET 2014
IPC: H01S 3/03
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: IKEDA Hiroyuki
池田 宏幸
KAKIZAKI Kouji
柿崎 弘司
TSUSHIMA Hiroaki
對馬 弘朗
Title: LASER CHAMBER
Abstract:
The present invention is capable of carrying out stable electrical discharge. A laser chamber is for a discharge excitation-type gas laser device and may be provided with the following: a first discharge electrode disposed inside the laser chamber; a second discharge electrode disposed inside the laser chamber so as to face the first discharge electrode; a fan for causing laser gas to flow between the first discharge electrode and the second discharge electrode; a first insulation member disposed on the upstream side and the downstream side of the laser gas flow at the first discharge electrode; a metal damper member disposed on the upstream side of the laser gas flow at the second discharge electrode; and a second insulation member disposed on the downstream side of the laser gas flow at the second discharge electrode.