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1. (WO2015123467) WAFER AND LOT BASED HIERARCHICAL METHOD COMBINING CUSTOMIZED METRICS WITH A GLOBAL CLASSIFICATION METHODOLOGY TO MONITOR PROCESS TOOL CONDITION AT EXTREMELY HIGH THROUGHPUT
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2015/123467    International Application No.:    PCT/US2015/015709
Publication Date: 20.08.2015 International Filing Date: 12.02.2015
IPC:
H01L 21/66 (2006.01)
Applicants: KLA-TENCOR CORPORATION [US/US]; Legal Department One Technology Drive, Milpitas Milpitas, California 95035 (US)
Inventors: VAJARIA, Himanshu; (US).
TORELLI, Tommaso; (US).
RIES, Bradley; (US).
MAHADEVAN, Mohan; (US)
Agent: MCANDREWS, Kevin; (US)
Priority Data:
61/939,739 14.02.2014 US
14/209,198 13.03.2014 US
Title (EN) WAFER AND LOT BASED HIERARCHICAL METHOD COMBINING CUSTOMIZED METRICS WITH A GLOBAL CLASSIFICATION METHODOLOGY TO MONITOR PROCESS TOOL CONDITION AT EXTREMELY HIGH THROUGHPUT
(FR) PROCÉDÉ HIÉRARCHIQUE BASÉ SUR UNE TRANCHE ET UN LOT COMBINANT DES MESURES PERSONNALISÉES AVEC UNE MÉTHODOLOGIE DE CLASSIFICATION GLOBALE POUR SURVEILLER UN ÉTAT D'OUTIL DE TRAITEMENT À TRÈS HAUT DÉBIT
Abstract: front page image
(EN)Methods and systems for monitoring process tool conditions are disclosed. The method combines single wafer, multiple wafers within a single lot and multiple lot information together statistically as input to a custom classification engine that can consume single or multiple scan, channel, wafer and lot to determine process tool status.
(FR)L'invention concerne des procédés et des systèmes permettant de surveiller des états d'outil de traitement. Le procédé combine conjointement une seule tranche, de multiples tranches dans un seul lot et de multiples informations de lot statistiquement sous la forme d'une entrée à un moteur de classification personnalisée qui peut utiliser un ou plusieurs balayages, canaux, tranches et lots pour déterminer l'état d'un outil de traitement.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)