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1. (WO2015123105) MULTI FLUID COOLING SYSTEM FOR LARGE TEMPERAURE RANGE CHUCK

Pub. No.:    WO/2015/123105    International Application No.:    PCT/US2015/014793
Publication Date: Fri Aug 21 01:59:59 CEST 2015 International Filing Date: Sat Feb 07 00:59:59 CET 2015
IPC: H01L 21/67
Applicants: AXCELIS TECHNOLOGIES, INC.
Inventors: LEE, William Davis
DRUMMOND, Steve
Title: MULTI FLUID COOLING SYSTEM FOR LARGE TEMPERAURE RANGE CHUCK
Abstract:
An electrostatic clamping system has an electrostatic chuck having one or more electrodes and a clamping surface and one or more fluid passages therethrough. A plurality of fluid sources has a respective plurality of fluids associated therewith, wherein each of the plurality of fluids are chemically distinct from one another and has a respective viable fluid temperature range associated therewith. A thermal unit is configured to heat and/or cool the plurality of fluids to one or more predetermined temperature setpoints. A valve assembly is configured to selectively fluidly couple each of the plurality of fluid sources to the one or more fluid passages of the electrostatic chuck. A controller is also configured to selectively fluidly couple the one or more fluid passages of the electrostatic chuck with a selected one or more of the plurality of fluid sources via a control of the valve assembly.