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1. (WO2015122713) CROSS SECTION SAMPLE PREPARATION APPARATUS AND ROTATIONAL CROSS SECTION SAMPLE PREPARATION APPARATUS

Pub. No.:    WO/2015/122713    International Application No.:    PCT/KR2015/001468
Publication Date: Fri Aug 21 01:59:59 CEST 2015 International Filing Date: Sat Feb 14 00:59:59 CET 2015
IPC: G01N 1/06
G01N 1/28
G01N 23/225
Applicants: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
한국과학기술원
Inventors: SOUN, Woosik
손우식
YOO, Jungho
유정호
YANG, Junmo
양준모
HYUN, Moonseop
현문섭
Title: CROSS SECTION SAMPLE PREPARATION APPARATUS AND ROTATIONAL CROSS SECTION SAMPLE PREPARATION APPARATUS
Abstract:
The present invention relates to a cross section sample preparation apparatus and a rotational cross section sample preparation apparatus which enable preparation of a sample for scanning electron microscope (SEM) analysis, and each of the apparatuses may comprise: at least one first milling machine for irradiating a first surface of a target with a first beam so as to mill the first surface; and at least one second milling machine for irradiating a second surface, which is the opposite surface to the first surface of the target, with a second beam so as to mill the second surface.