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1. (WO2015122471) INSPECTION UNIT

Pub. No.:    WO/2015/122471    International Application No.:    PCT/JP2015/053866
Publication Date: Fri Aug 21 01:59:59 CEST 2015 International Filing Date: Fri Feb 13 00:59:59 CET 2015
IPC: G01R 31/26
H01R 13/24
H01R 33/76
Applicants: NHK SPRING CO., LTD.
日本発條株式会社
Inventors: HIRONAKA, Kohei
広中 浩平
NIDAIRA, Takashi
仁平 崇
YONEDA, Tomohiro
米田 知広
Title: INSPECTION UNIT
Abstract:
An inspection unit according to the present invention is provided with: first contact probes which are brought into contact with electrodes provided to a front surface of one object to be contacted, and which are brought into contact with electrodes of another object to be contacted; second contact probes which are brought into contact with electrodes provided to a rear surface of the one object to be contacted, and which are brought into contact with electrodes of a substrate; a first probe holder which accommodates and holds the plurality of first contact probes, and which is provided with a suction-holding unit that applies suction to and holds the one object to be contacted; a second probe holder which accommodates and holds the plurality of second contact probes; and a base part which is stacked upon the first probe holder, and which holds, at a side thereof that is stacked upon the first probe holder, the other object to be contacted. A gap is formed between the first probe holder and the other object to be contacted.