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1. (WO2015122222) TABLE APPARATUS, TRANSFER APPARATUS, AND SEMICONDUCTOR MANUFACTURING APPARATUS

Pub. No.:    WO/2015/122222    International Application No.:    PCT/JP2015/050542
Publication Date: Fri Aug 21 01:59:59 CEST 2015 International Filing Date: Sat Jan 10 00:59:59 CET 2015
IPC: G12B 5/00
B23Q 1/44
H01L 21/027
H01L 21/68
Applicants: NSK Ltd.
日本精工株式会社
Inventors: SATOU, Toshinori
佐藤 俊徳
Title: TABLE APPARATUS, TRANSFER APPARATUS, AND SEMICONDUCTOR MANUFACTURING APPARATUS
Abstract:
A table apparatus (100) is provided with: a first member (1) capable moving within a predetermined plane; a second member (2) capable of relatively moving with respect to the first member; a first guide apparatus (4), which has at least a part thereof disposed on the first member, and which guides the second member such that, due to the moving of the first member, the second member moves in the direction parallel to a first axis orthogonal to the predetermined plane; a table having a first portion supported by means of the second member; and a plurality of second guide apparatuses (5), each of which has at least a part thereof connected to each of a plurality of second portions of the table, said second portions being disposed to surround the first portion, and each of which guides the table such that the table moves in the direction parallel to the first axis.