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1. (WO2015121952) DETECTION DEVICE

Pub. No.:    WO/2015/121952    International Application No.:    PCT/JP2014/053392
Publication Date: Fri Aug 21 01:59:59 CEST 2015 International Filing Date: Sat Feb 15 00:59:59 CET 2014
IPC: G01N 21/956
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社 日立ハイテクノロジーズ
Inventors: HAMAMATSU Akira
浜松 玲
KONDO Takanori
近藤 貴則
TAKAHASHI Kazuo
高橋 和夫
Title: DETECTION DEVICE
Abstract:
The size of semiconductors has been becoming increasingly smaller compared to conventional devices. Thus, detection of smaller defects, or in other words, increased sensitivity is demanded of detection devices. One approach to increase sensitivity is to improve data processing. However, with conventional techniques, it is not possible to sufficiently achieve data processing suitable for increasing sensitivity. One characteristic of the present invention is that a plurality of tracks of data are obtained, and two-dimensional correlation filtering is performed on the data. It is possible to detect smaller defects with the present invention than with conventional devices.