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1. (WO2015121447) 3D MAGNETIC FIELD SENSOR AND METHOD FOR PRODUCING SAME

Pub. No.:    WO/2015/121447    International Application No.:    PCT/EP2015/053155
Publication Date: Fri Aug 21 01:59:59 CEST 2015 International Filing Date: Sat Feb 14 00:59:59 CET 2015
IPC: G01R 33/00
G01R 33/02
G01R 33/09
G01B 7/30
H01L 43/02
H01L 43/08
Applicants: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Inventors: UEBERSCHÄR, Olaf
ECKE, Ramona
SCHULZ, Stefan
MATTHES, Patrick
ALBRECHT, Manfred
Title: 3D MAGNETIC FIELD SENSOR AND METHOD FOR PRODUCING SAME
Abstract:
The invention relates to a 3D magnetic field sensor for detecting three spatial magnetic field components in a reference region, said sensor being usuable in a magnetic field camera for example. The sensor has a first magnetoresistive sensor element arrangement, a second magnetoresistive sensor element arrangement, and a third magnetoresistive sensor element arrangement. The first magnetoresistive sensor element arrangement is designed to detect a first magnetic field component with respect to a first spatial axis and with respect to the reference region. The second magnetoresistive sensor element arrangement is designed to detect a second magnetic field component with respect to a second spatial axis and with respect to the reference region. The third magnetoresistive sensor element arrangement is designed to detect a third magnetic field component with respect to a third spatial axis and with respect to the reference region. Each of the magnetoresistive sensor element arrangements is arranged as a bridge circuit with a plurality of magnetoresistive sensor elements. The spatial axes run along linearly independent position vectors in space.