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1. (WO2015120194) PRESSURE-ADJUSTING LAPPING ELEMENT
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2015/120194 International Application No.: PCT/US2015/014683
Publication Date: 13.08.2015 International Filing Date: 05.02.2015
IPC:
B24B 37/11 (2012.01) ,B24B 37/27 (2012.01)
B PERFORMING OPERATIONS; TRANSPORTING
24
GRINDING; POLISHING
B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
37
Lapping machines or devices; Accessories
11
Lapping tools
B PERFORMING OPERATIONS; TRANSPORTING
24
GRINDING; POLISHING
B
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
37
Lapping machines or devices; Accessories
27
Work carriers
Applicants:
VEECO INSTRUMENTS, INC. [US/US]; 1 Terminal Drive Plainview, New York 11803, US
Inventors:
SCHUH, Gregory W.; US
HEUGHEBAERT, Laurent; US
Agent:
DRENNAN, Eric; US
Priority Data:
61/936,04605.02.2014US
Title (EN) PRESSURE-ADJUSTING LAPPING ELEMENT
(FR) ÉLÉMENT DE RODAGE À RÉGLAGE DE PRESSION
Abstract:
(EN) A pressure-adjusting lapping element (132, 232, 332, 432, 532) is included as a structural component of a carrier assembly (130, 230, 330) in a lapping head (116). The lapping element includes actuator nodes (274, 474, 574) that permit fine tuning of a lapping force applied through the lapping element to a work piece (224, 324, 424, 524). An actuator assembly (246) is directly attached to the lapping element and manipulates the individual actuator nodes. The lapping element further includes whippletree structure to permit a desired degree of flexibility in the lapping element to respond to force inputs at the actuator nodes.
(FR) L'invention concerne un élément de rodage à réglage de pression (132, 232, 332, 432, 532) qui est inclus comme composant structural d'un ensemble de support (130, 230, 330) dans une tête de rodage (116). L'élément de rodage comprend des nœuds actionneurs (274, 474, 574) qui permettent un réglage fin d'une force de rodage appliquée par l'élément de rodage à une pièce à travailler (224, 324, 424, 524). Un ensemble actionneur (246) est directement fixé à l'élément de rodage et manipule les nœuds actionneurs individuels. L'élément de rodage comprend en outre une structure de palonnier pour permettre un degré de flexibilité souhaité dans l'élément de rodage afin de répondre à des entrées de force au niveau des nœuds actionneurs.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)