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Machine translation
1. (WO2015119734) PIXELATED TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2015/119734    International Application No.:    PCT/US2015/010468
Publication Date: 13.08.2015 International Filing Date: 07.01.2015
IPC:
H01L 21/683 (2006.01), H01L 21/324 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US)
Inventors: PARKHE, Vijay D.; (US).
MAKHRATCHEV, Konstantin; (US).
ONO, Masanori; (JP).
GUO, Zhiqiang; (US)
Agent: PATTERSON, B. Todd; (US)
Priority Data:
61/937,348 07.02.2014 US
14/285,606 22.05.2014 US
Title (EN) PIXELATED TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY
(FR) ENSEMBLE SUPPORT DE SUBSTRAT PIXELISÉ CONTRÔLÉ EN TEMPÉRATURE
Abstract: front page image
(EN)Implementations described herein provide a pixelated substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The pixelated substrate support assembly comprises an upper surface and a lower surface; one or more main resistive heaters disposed in the pixelated substrate support; and a plurality of pixel heaters in column with the main resistive heaters and disposed in the substrate support. A quantity of the pixel heaters is an order of magnitude greater than a quantity of the main resistive heaters and the pixel heaters are independently controllable relative to each other as well as the main resistive heater.
(FR)Selon certains modes de réalisation, cette invention concerne ensemble support de substrat pixelisé assurant la régulation latérale et azimutale du transfert transfert de chaleur entre un mandrin électrostatique et un ensemble chauffant. Ledit ensemble support de substrat pixelisé comprend : une surface supérieure et une surface inférieure ; un ou plusieurs éléments chauffants résistifs principaux disposés dans l'ensemble support de substrat pixelisé ; et une pluralité d'éléments chauffants de pixel agencés en colonnes avec les éléments chauffants résistifs principaux et disposés dans le support de substrat. Un nombre d'éléments chauffants de pixel présente un ordre de grandeur supérieur à un nombre d'éléments chauffants résistifs principaux et les éléments chauffants de pixel sont commandables indépendamment les uns des autres et par rapport à l'élément chauffant résistif principal.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)