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1. (WO2015118634) LIGHTING DEVICE, OBSERVATION DEVICE, AND OBSERVATION METHOD

Pub. No.:    WO/2015/118634    International Application No.:    PCT/JP2014/052690
Publication Date: Fri Aug 14 01:59:59 CEST 2015 International Filing Date: Thu Feb 06 00:59:59 CET 2014
IPC: G02B 21/06
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: HATADA Hitoshi
畑田 仁志
OUCHI Yumiko
大内 由美子
Title: LIGHTING DEVICE, OBSERVATION DEVICE, AND OBSERVATION METHOD
Abstract:
A lighting device wherein a sample is lighted by interference fringes, the device provided with: a light bundle generating unit that generates first and second light bundles from light that is emitted from a light source; a phase imparting unit that creates a phase difference between the first light bundle and the second light bundle; an interference optical system that interferes with the first light bundle and the second light bundle and generates interference fringes; and a drive control unit that drives the light bundle generating unit and the phase imparting unit and that alters the phase difference or the direction of the interference fringes or both.