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Machine translation
1. (WO2015118237) ELECTROSTATIC HEATING SUBSTRATE HOLDER WHICH IS POLARISED AT HIGH VOLTAGE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2015/118237    International Application No.:    PCT/FR2015/000028
Publication Date: 13.08.2015 International Filing Date: 04.02.2015
IPC:
H01L 21/683 (2006.01)
Applicants: ION BEAM SERVICES [FR/FR]; ZI Peynier-Rousset rue Gaston Imbert prolongée F-13790 Peynier (FR)
Inventors: TORREGROSA, Frank; (FR).
ROUX, Laurent; (FR)
Agent: RENAUD-GOUD CONSEIL; 5, rue de Montigny F-13100 Aix-En-Provence (FR)
Priority Data:
1400352 07.02.2014 FR
Title (EN) ELECTROSTATIC HEATING SUBSTRATE HOLDER WHICH IS POLARISED AT HIGH VOLTAGE
(FR) PORTE-SUBSTRAT ÉLECTROSTATIQUE CHAUFFANT ET POLARISÉ EN HAUTE TENSION
Abstract: front page image
(EN)The present invention relates to a bracket comprising an electrically conductive polarised table (10) which is connected to a high-voltage power supply (12) supported by an electrically insulating base (40), an electrically insulating substrate holder (20) which is cylindrical, the upper face thereof having a support plane for receiving a substrate (50), feet (15) which rest on the polarised table (10) in order to support the lower face of the substrate holder (20), at least one electrically conductive connection (201, 202, 203, 31, 30) for connecting the support plane to the polarised table (10). The bracket is characterized in that the substrate holder (20) incorporates a heating resistor (26).
(FR)La présente invention concerne un support comportant; une table polarisée 10 électriquement conductrice raccordée à une alimentation haute tension 12 qui repose sur un socle 40 électriquement isolant, un porte-substrat 20 électriquement isolant prenant la forme d'un cylindre, sa face supérieure présentant un plan d'appui prévu pour recevoir un substrat 50, des pieds 15 qui reposent sur la table polarisée 10 pour supporter la face inférieure du porte-substrat 20, au moins une liaison électriquement conductrice 201, 202, 203, 31, 30 pour raccorder le plan d'appui à la table polarisée 10, Le support est remarquable en ce que le porte-substrat 20 incorpore une résistance de chauffage 26.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: French (FR)
Filing Language: French (FR)