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1. (WO2015116930) DIFFUSION RESISTANT ELECTROSTATIC CLAMP
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2015/116930    International Application No.:    PCT/US2015/013772
Publication Date: 06.08.2015 International Filing Date: 30.01.2015
IPC:
H01L 21/687 (2006.01), H01L 21/205 (2006.01)
Applicants: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. [US/US]; 35 Dory Road Gloucester, Massachusetts 01930 (US).
ENTEGRIS, INC. [US/US]; 3500 Lyman Boulevard Chaska, Minnesota 55318 (US)
Inventors: STONE, Dale K.; (US).
COOKE, Richard; (US).
LIN, I-Kuan; (US).
BLAKE, Julian G.; (US).
STONE, Lyudmila; (US)
Agent: DAISAK, Daniel N.; (US)
Priority Data:
61/933,659 30.01.2014 US
14/280,245 16.05.2014 US
Title (EN) DIFFUSION RESISTANT ELECTROSTATIC CLAMP
(FR) PINCE ÉLECTROSTATIQUE RÉSISTANT À LA DIFFUSION
Abstract: front page image
(EN)In one embodiment, a method of fabricating an electrostatic clamp includes forming an insulator body, forming an electrode on the insulator body, and depositing a layer stack on the electrode, the layer stack comprising an aluminum oxide layer that is deposited using atomic layer deposition (ALD).
(FR)Dans un mode de réalisation, un procédé de fabrication d'une pince électrostatique comprend l'étape consistant à former un corps d'isolateur, à former une électrode sur le corps d'isolateur, et à déposer un empilement de couches sur l'électrode, l'empilement de couches comprenant une couche d'oxyde d'aluminium qui est déposée par dépôt en couche atomique (ALD)
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)