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1. (WO2015116758) LOW EXPANSION SILICA-TITANIA ARTICLES WITH A Tzc GRADIENT BY COMPOSITIONAL VARIATION

Pub. No.:    WO/2015/116758    International Application No.:    PCT/US2015/013417
Publication Date: Fri Aug 07 01:59:59 CEST 2015 International Filing Date: Fri Jan 30 00:59:59 CET 2015
IPC: C03C 3/06
C03C 3/062
C03B 19/14
G03F 1/24
Applicants: CORNING INCORPORATED
Inventors: ANGELL, William R, IV
ANNAMALAI, Sezhian
DURAN, Carlos Alberto
MAXON, John Edward
Title: LOW EXPANSION SILICA-TITANIA ARTICLES WITH A Tzc GRADIENT BY COMPOSITIONAL VARIATION
Abstract:
A glass article for use in Extreme Ultra Violet Lithography (EUVL) is provided. The glass article includes a silica-titania glass having a compositional gradient through the glass article, the compositional gradient being defined by the functions: [TiO2] = (c + f(x,y,z)), and [SiO2] = (100 - {c + f(x,y,z)} - δ(x,y,z) ) wherein [TiO2] is the concentration of titania in wt.%, [SiO2] is the concentration of silica in wt.%, c is the titania concentration in wt.% for a predetermined zero crossover temperature (Tzc), f(x,y,z) is a function in three-dimensional space that defines the difference in average composition of a volume element centered at the coordinates (x,y,z) with respect to c, and δ(x,y,z) is a function in three-dimensional space that defines the sum of all other components of a volume element centered at the coordinates (x,y,z).