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1. (WO2015116455) CHAMBER COATINGS
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2015/116455    International Application No.:    PCT/US2015/012304
Publication Date: 06.08.2015 International Filing Date: 21.01.2015
IPC:
H01L 21/56 (2006.01), H01L 21/02 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US)
Inventors: DUAN, Ren-Guan; (US).
ROCHA-ALVAREZ, Juan Carlos; (US).
ZHOU, Jianhua; (US).
LIU, Ningli; (US).
CHEN, Yihong; (US).
MALLICK, Abhijit Basu; (US).
GONDHALEKAR, Sudhir R.; (US)
Agent: PATTERSON, B. Todd; (US)
Priority Data:
61/934,560 31.01.2014 US
62/025,613 17.07.2014 US
Title (EN) CHAMBER COATINGS
(FR) REVÊTEMENTS DE CHAMBRE
Abstract: front page image
(EN)In one embodiment, a processing chamber is disclosed wherein at least one surface of the processing chamber has a coating comprising SivYwMgxAlyOz, wherein v ranges from about 0.0196 to 0.2951, w ranges from about 0.0131 to 0.1569, x ranges from about 0.0164 to 0.0784, y ranges from about 0.0197 to 0.1569, z ranges from about 0.5882 to 0.6557, and v+w+x+y+z=1.
(FR)Dans un mode de réalisation, l'invention concerne une chambre de traitement, au moins une surface de la chambre de traitement présentant un revêtement comprenant du SivYwMgxAlyOz, v étant compris entre environ 0,0196 et 0,2951, w étant compris entre environ 0,0131 et 0,1569, x étant compris entre environ 0,0164 et 0,0784, y étant compris entre environ 0,0197 et 0,1569, z étant compris entre environ 0,5882 et 0,6557, et v + w + x + y + z = 1
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)