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1. (WO2015113713) BEAM PROPAGATION CAMERA AND METHOD FOR LIGHT BEAM ANALYSIS

Pub. No.:    WO/2015/113713    International Application No.:    PCT/EP2014/078943
Publication Date: Fri Aug 07 01:59:59 CEST 2015 International Filing Date: Tue Dec 23 00:59:59 CET 2014
IPC: G01J 1/42
B23K 26/30
G02B 27/10
G01J 1/04
Applicants: CARL ZEISS SMT GMBH
MANGER, Matthias
Inventors: MANGER, Matthias
Title: BEAM PROPAGATION CAMERA AND METHOD FOR LIGHT BEAM ANALYSIS
Abstract:
The invention relates to a beam propagation camera and a method for light beam analysis. A beam propagation camera according to the invention comprises at least one beam-splitting optical arrangement (240) which splits a beam impinging on the beam-splitting optical arrangement along an optical axis (OA) of the beam propagation camera during operation into a plurality of partial beams, and a sensor arrangement (250) for detecting said partial beams, wherein the beam-splitting optical arrangement (240) has a diffractive structure (241), and wherein said diffractive structure (241) is designed in such a way that at least two of the partial beams on the sensor arrangement (250) are spatially separated from one another and have a focus offset in a longitudinal direction relative to the optical axis (OA).