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1. (WO2015048449) CARBON FIBER RING SUSCEPTOR
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2015/048449 International Application No.: PCT/US2014/057728
Publication Date: 02.04.2015 International Filing Date: 26.09.2014
IPC:
H01L 21/683 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
Applicants:
APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, CA 95054, US
Inventors:
RANISH, Joseph M.; US
BRILLHART, Paul; US
SAMIR, Mehmet Tugrul; US
LAU, Shu-Kwan; US
KUMAR, Surajit; US
Agent:
PATTERSON, B. Todd; US
Priority Data:
14/495,65424.09.2014US
61/883,16726.09.2013US
Title (EN) CARBON FIBER RING SUSCEPTOR
(FR) SUSCEPTEUR ANNULAIRE EN FIBRE DE CARBONE
Abstract:
(EN) Embodiments described herein generally relate to an apparatus for heating substrates. In one embodiment, a susceptor comprises a ring shaped body having a central opening and a lip extending from an edge of the body that circumscribes the central opening. The susceptor comprises carbon fiber or graphene. In another embodiment, a method for forming a susceptor comprises molding carbon fiber with an organic binder into a shape of a ring susceptor and firing the organic binder. In yet another embodiment, a method for forming a susceptor comprises layering graphene sheets into a shape of a ring susceptor.
(FR) Des modes de réalisation selon la présente invention portent généralement sur un appareil permettant de chauffer des substrats. Selon un mode de réalisation, un suscepteur comprend un corps annulaire comportant une ouverture centrale et une lèvre s'étendant depuis un bord du corps qui circonscrit l'ouverture centrale. Le suscepteur comprend de la fibre de carbone ou du graphène. Selon un autre mode de réalisation, un procédé permettant de former un suscepteur consiste à mouler de la fibre de carbone avec un liant organique dans la forme d'un suscepteur annulaire et à cuire le liant organique. Selon encore un autre mode de réalisation, un procédé permettant de former un suscepteur consiste à stratifier des feuilles de graphène dans la forme d'un suscepteur annulaire.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)