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1. (WO2015047764) MOVABLE MEMS ELEMENT WITH STICTION MITIGATING SPRING

Pub. No.:    WO/2015/047764    International Application No.:    PCT/US2014/055584
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Tue Sep 16 01:59:59 CEST 2014
IPC: G02B 26/02
Applicants: PIXTRONIX, INC.
Inventors: DE GROOT, Wilhelmus A.
Title: MOVABLE MEMS ELEMENT WITH STICTION MITIGATING SPRING
Abstract:
Systems, methods and methods of manufacture for, among other things, a MEMS device may be provided with a pair of electrodes that are separated by a gap. At least one of the electrodes is movable toward the other electrode. The MEMS device may include a beam that is positioned within the gap and arranged between the electrodes. As the movable electrode moves toward the other electrode, a portion of the MEMS device also moves towards, comes into contact with, and deflects the beam. As the beam deflects, it applies a force upon the MEMS device that opposes the movement of electrode toward the other electrode.