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1. (WO2015047722) ROTATABLE SUBSTRATE SUPPORT HAVING RADIO FREQUENCY APPLICATOR
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2015/047722 International Application No.: PCT/US2014/054767
Publication Date: 02.04.2015 International Filing Date: 09.09.2014
IPC:
H01L 21/683 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
Applicants:
APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, CA 95054, US
Inventors:
KOBAYASHI, Satoru; US
FLOYD, Kirby H.; US
HANAWA, Hiroji; US
PARK, Soonam; US
LUBOMIRSKY, Dmitry; US
KENNEY, Jason A.; US
Agent:
PATTERSON, B. Todd; US
Priority Data:
14/091,05726.11.2013US
61/882,94226.09.2013US
Title (EN) ROTATABLE SUBSTRATE SUPPORT HAVING RADIO FREQUENCY APPLICATOR
(FR) SUPPORT DE SUBSTRAT ROTATIF QUI COMPORTE UN APPLICATEUR DE RADIOFRÉQUENCE
Abstract:
(EN) A substrate support assembly includes a shaft assembly, a pedestal coupled to a portion of the shaft assembly, and a first rotary connector coupled to the shaft assembly, wherein the first rotary connector comprises a first coil member surrounding a rotatable shaft member that is electrically coupled to the shaft assembly, the first coil member being rotatable with the rotatable shaft, and a second coil member surrounding the first coil member, the second coil member being stationary relative to the first coil member, wherein the first coil member electrically couples with the second coil member when the rotating radio frequency applicator is energized and provides a radio frequency signal/power to the pedestal through the shaft assembly.
(FR) L'invention concerne un ensemble support de substrat qui comprend un ensemble arbre, un socle couplé à une partie de l'ensemble arbre, et un premier connecteur rotatif couplé à l'ensemble arbre, le premier connecteur rotatif comprenant un premier élément de bobine qui entoure un élément d'arbre rotatif qui est couplé électriquement à l'ensemble arbre, le premier élément de bobine pouvant tourner avec l'arbre rotatif, et un second élément de bobine qui entoure le premier élément de bobine, le second élément de bobine étant fixe par rapport au premier élément de bobine, le premier élément de bobine étant raccordé électriquement au second élément de bobine lorsque l'applicateur de radiofréquence est alimenté et transmet un signal radiofréquence, une puissance au socle au moyen de l'ensemble arbre.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)