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1. (WO2015047639) SUPPORT RING WITH ENCAPSULATED LIGHT BARRIER

Pub. No.:    WO/2015/047639    International Application No.:    PCT/US2014/052928
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Thu Aug 28 01:59:59 CEST 2014
IPC: H01L 21/324
H01L 21/02
Applicants: APPLIED MATERIALS, INC.
Inventors: RANISH, Joseph, M.
Title: SUPPORT RING WITH ENCAPSULATED LIGHT BARRIER
Abstract:
Embodiments described herein provide a thermal processing apparatus with a heat source and a rotating substrate support opposite the heat source, the rotating substrate support comprising a support member with a light blocking member. The light blocking member may be an encapsulated component, or may be movably disposed inside the support member. The light blocking member may be opaque and/or reflective, and may be a refractory metal.