A semiconductor package comprising a suspended beam portion including an arrangement of through-hole structures. In an embodiment, a first surface of the suspended beam portion includes edges each defining in part a respective through-hole of a plurality of through-holes extending between the first surface and a second surface. The first surface comprises a plurality of arm portions each located between a respective pair of edge-adjacent edges. The first surface comprises a plurality of node portions each located at a respective junction of three or more of the plurality of arm portions. In another embodiment, for each of the plurality of node portions, a respective total number of arm portions which join one another at the node portion is a number other than four, or two arm portions which join one another at the node portion have respective mid-lines which are oblique to one another.