Search International and National Patent Collections

1. (WO2015047294) METHODS OF FORMING TUNEABLE TEMPERATURE COEFFICIENT FOR EMBEDDED RESISTORS

Pub. No.:    WO/2015/047294    International Application No.:    PCT/US2013/062164
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Sat Sep 28 01:59:59 CEST 2013
IPC: H01L 21/027
H01L 21/265
H01L 21/336
Applicants: INTEL CORPORATION
HAFEZ, Walid
LEE, Chen-Guan
JAN, Chia-Hong
Inventors: HAFEZ, Walid
LEE, Chen-Guan
JAN, Chia-Hong
Title: METHODS OF FORMING TUNEABLE TEMPERATURE COEFFICIENT FOR EMBEDDED RESISTORS
Abstract:
Methods of forming resistor structures with tunable temperature coefficient of resistance are described. Those methods and structures may include forming an opening in a resistor material adjacent source/drain openings on a device substrate, forming a dielectric material between the resistor material and the source/drain openings, and modifying the resistor material, wherein a temperature coefficient resistance (TCR) of the resistor material is tuned by the modification. The modifications include adjusting a length of the resistor, forming a compound resistor structure, and forming a replacement resistor.