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1. (WO2015047281) VERTICAL NON-PLANAR SEMICONDUCTOR DEVICE FOR SYSTEM-ON-CHIP (SOC) APPLICATIONS

Pub. No.:    WO/2015/047281    International Application No.:    PCT/US2013/062015
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Fri Sep 27 01:59:59 CEST 2013
IPC: H01L 21/336
Applicants: INTEL CORPORATION
Inventors: JAN, Chia-Hong
HAFEZ, Walid, M.
TSAI, Curtis
YEH, Jeng-Ya, D.
PARK, Joodong
Title: VERTICAL NON-PLANAR SEMICONDUCTOR DEVICE FOR SYSTEM-ON-CHIP (SOC) APPLICATIONS
Abstract:
Vertical non-planar semiconductor devices for system-on-chip (SoC) applications and methods of fabricating vertical non-planar semiconductor devices are described. For example, a semiconductor device includes a semiconductor fin disposed above a substrate, the semiconductor fin having a recessed portion and an uppermost portion. A source region is disposed in the recessed portion of the semiconductor fin. A drain region is disposed in the uppermost portion of the semiconductor fin. A gate electrode is disposed over the uppermost portion of the semiconductor fin, between the source and drain regions.