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1. (WO2015046753) IMPEDANCE MATCHING METHOD AND IMPEDANCE MATCHING SYSTEM

Pub. No.:    WO/2015/046753    International Application No.:    PCT/KR2014/007522
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Thu Aug 14 01:59:59 CEST 2014
IPC: H03H 7/38
Applicants: MKS KOREA LTD.
Inventors: KIM, Jae-Hyun
LEE, Sang-Won
Title: IMPEDANCE MATCHING METHOD AND IMPEDANCE MATCHING SYSTEM
Abstract:
Provided are an impedance matching device and an impedance matching method. A variable reactance impedance matching network is disposed between a variable frequency RF power source varying a driving frequency (f) and a load. An impedance matching method of the variable reactance impedance matching network includes controlling variation amount of capacitance or reactance of a variable reactive component of the impedance matching network as a function of a difference between a target driving frequency ft and the driving frequency.