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1. (WO2015045890) MAGNETIC DISK INSPECTION DEVICE AND MAGNETIC DISK INSPECTION METHOD

Pub. No.:    WO/2015/045890    International Application No.:    PCT/JP2014/074127
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Fri Sep 12 01:59:59 CEST 2014
IPC: G11B 5/84
G01N 21/95
Applicants: HITACHI HIGH-TECH FINE SYSTEMS CORPORATION
株式会社日立ハイテクファインシステムズ
Inventors: SERIKAWA Shigeru
芹川 滋
ISHIGURO Takayuki
石黒 隆之
Title: MAGNETIC DISK INSPECTION DEVICE AND MAGNETIC DISK INSPECTION METHOD
Abstract:
In order to make it possible to increase horizontal resolution while preventing the depth of focus from becoming shallow and detect a defect in a magnetic disk inspection device, a magnetic disk inspection device is configured to be provided with: a table part which has a spindle shaft and a stage; a lighting system which irradiates a magnetic disk with a laser; a specularly reflected light detection optical system which detects specularly reflected light from the magnetic disk; a scattered light detection optical system which detects scattered light from the magnetic disk; and a signal processing unit which processes outputs from the specularly reflected light detection optical system and the scattered light detection optical system and detects a defect. The scattered light detection optical system is provided with a lens system having a plurality of lenses and a photoelectric converter having a plurality of photoelectric conversion elements arranged in an array, and using the lens system, forms, on the plurality of photoelectric conversion elements arranged in an array of the photoelectric converter, an image of the scattered light from the surface of the magnetic disk, the scattered light being long in one direction and shaped thinner than the width of the photoelectric conversion element in a direction perpendicular to the direction of the arrangement in an array.