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|1. (WO2015045582) PURGING DEVICE AND PURGING METHOD|
|Applicants:||MURATA MACHINERY, LTD.
|Title:||PURGING DEVICE AND PURGING METHOD|
The purpose of the invention is to ensure the safety of an operator and minimize the area in which purging is halted. The internal space of a device is divided into a work area and a non-work area, and purging products in the work area is halted while purging of products in the non-work area is carried on. The oxygen concentration in the work area is measured, and if the oxygen concentration in the work area decreases to a predetermined value or lower, purging of products in the non-work area is halted.