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1. (WO2015045582) PURGING DEVICE AND PURGING METHOD

Pub. No.:    WO/2015/045582    International Application No.:    PCT/JP2014/069018
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Fri Jul 18 01:59:59 CEST 2014
IPC: H01L 21/673
Applicants: MURATA MACHINERY, LTD.
村田機械株式会社
Inventors: MURATA Masanao
村田 正直
TOKUMOTO Mitsuya
徳本 光哉
YAMAJI Takashi
山路 孝
ADACHI Naruto
安達 成人
Title: PURGING DEVICE AND PURGING METHOD
Abstract:
The purpose of the invention is to ensure the safety of an operator and minimize the area in which purging is halted. The internal space of a device is divided into a work area and a non-work area, and purging products in the work area is halted while purging of products in the non-work area is carried on. The oxygen concentration in the work area is measured, and if the oxygen concentration in the work area decreases to a predetermined value or lower, purging of products in the non-work area is halted.