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1. (WO2015045411) GAS SENSOR

Pub. No.:    WO/2015/045411    International Application No.:    PCT/JP2014/004955
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Sat Sep 27 01:59:59 CEST 2014
IPC: G01N 21/61
G01N 21/03
G01N 21/3504
H01L 31/12
Applicants: ASAHI KASEI MICRODEVICES CORPORATION
旭化成エレクトロニクス株式会社
Inventors: CAMARGO, Edson Gomes
カマルゴ エジソン ゴメス
TAKEHARA, Satoshi
竹原 聡
Title: GAS SENSOR
Abstract:
Provided is a simple, small, and highly reliable gas sensor whereby a measurement error can be reduced. This gas sensor is provided with: a first light source (20); and a first sensor section (31) and a second sensor section (32), which are disposed so as to have inputted thereto light having been outputted from the first light source (20). The gas sensor is also provided with: a first substrate (41) having the first light source (20) and the first sensor section (31) provided on a first main surface (411) thereof; and a second substrate (42) having the second sensor section (32) provided on a first main surface (422). The position where the first sensor section (31) is disposed is on the first main surface (411) of the first substrate (41), and is set where light reflected by the second main surface (412) is inputted, said light being among the light having been outputted from the first light source (20).