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1. (WO2015045205) PRODUCTION METHOD AND PRODUCTION SYSTEM FOR MAGNETORESISTANCE ELEMENT

Pub. No.:    WO/2015/045205    International Application No.:    PCT/JP2014/002210
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Sat Apr 19 01:59:59 CEST 2014
IPC: H01L 43/12
H01L 21/302
H01L 21/8246
H01L 27/105
H01L 43/08
Applicants: CANON ANELVA CORPORATION
キヤノンアネルバ株式会社
Inventors: HAYASHI, Marie
林 真里恵
SAKAMOTO, Kiyotaka
坂本 清尚
IKEDA, Masayoshi
池田 真義
Title: PRODUCTION METHOD AND PRODUCTION SYSTEM FOR MAGNETORESISTANCE ELEMENT
Abstract:
Provided are a production method and a production system for a magnetoresistance element that achieve a further decrease in the size of a magnetoresistance element and a further increase in degree of integration, and that make it possible to produce a magnetoresistance element having high magnetic properties. The production method for a magnetoresistance element comprises: a step (S121) in which a layered body is prepared on a substrate (100), said layered body being provided with one layer (103) of two magnetic layers, a layer (104) that constitutes a tunnel barrier layer, and the other layer (105) of the two magnetic layers; a step (S122) in which the layered body is separated into a plurality of layered bodies by etching and a plurality of layered bodies are thereby formed on the substrate; a step (S123) in which side sections of the plurality of separated layered bodies are irradiated with an ion beam within a treatment chamber (501) that can be depressurized; and a step (S124) in which an oxidizing gas or a nitriding gas is introduced into the treatment chamber after irradiating with the ion beam and an oxide layer or a nitride layer is formed on the surfaces of the plurality of layered bodies.