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1. (WO2015045098) LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

Pub. No.:    WO/2015/045098    International Application No.:    PCT/JP2013/076270
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Sat Sep 28 01:59:59 CEST 2013
IPC: H01S 3/23
H01L 21/027
H01S 3/038
H05G 2/00
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: SUGANUMA, Takashi
菅沼 崇
MIZOGUCHI, Hakaru
溝口 計
WAKABAYASHI, Osamu
若林 理
Title: LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Abstract:
[Problem] To acquire high-output laser light. [Solution] The present invention may be provided with: a first polarization device having a polarization axis in a direction substantially matching the polarization direction of laser light of incident linearly polarized light; a second polarization device having a polarization axis in a direction substantially matching the direction of the polarization axis of the first polarization device; and a laser amplifier, which includes a pair of discharge electrodes disposed opposite each other so that the opposing directions substantially match the directions of the polarization axis of the first polarization device, and which is disposed between the first polarization device and the second polarization device.