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1. (WO2015043638) CHUCK FOR SUCTION AND HOLDING A WAFER

Pub. No.:    WO/2015/043638    International Application No.:    PCT/EP2013/070092
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Fri Sep 27 01:59:59 CEST 2013
IPC: H01L 21/67
H01L 21/683
Applicants: SUSS MICROTEC LITHOGRAPHY GMBH
Inventors: CONRADI, Matthias
HANSEN, Sven
Title: CHUCK FOR SUCTION AND HOLDING A WAFER
Abstract:
The invention relates to a chuck and a method for suction and holding a wafer by said chuck, wherein the chuck comprises: a flat top face being subdivided into several suction segments, wherein the suction segments are each configured for suctioning a fluid; and a bottom face. The method comprises the steps: bringing, within a fluid, wafer and top face of the chuck into vicinity such that two or more of the suction segments are covered, at least loosely covered, by the wafer; choosing, from the suction segments not yet been activated, a suction segment having a minimal distance to the wafer; activating the suction segment chosen in the previous step; once the wafer in the area of the last-activated suction segment tightly touches the top face of the chuck and as long as at least one suction segment is not yet activated: repeating the foregoing steps.