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1. (WO2015043583) MEASUREMENT SYSTEM AND MEASUREMENT METHOD FOR MEASURING A SURFACE DEFLECTION BY MEANS OF A PLASMONIC REFLECTOR

Pub. No.:    WO/2015/043583    International Application No.:    PCT/DE2014/200351
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Sat Jul 26 01:59:59 CEST 2014
IPC: G01L 1/24
G01B 11/16
G01N 21/55
Applicants: SCHAEFFLER TECHNOLOGIES AG & CO. KG
Inventors: SCHIFFLER, Andreas
GIERL, Jürgen
BENKERT, Frank
Title: MEASUREMENT SYSTEM AND MEASUREMENT METHOD FOR MEASURING A SURFACE DEFLECTION BY MEANS OF A PLASMONIC REFLECTOR
Abstract:
The invention relates to a measurement system and to a measurement method for measuring a surface deflection on a machine part (41). In order to improve previous methods of the prior art, according to the invention, an optical approach is pursued which includes the generating of a test light beam (45) and uses a plasmonic reflector (31, 32, 33, 40) having a periodic structure (10, 11, 12) to generate plasmons. In dependence on the distortion of the periodic structure (10, 11, 12), which is substantially a nanostructure (11), which can be embedded in a microstructure (10, 12) as applicable, a part of an energy of each interacting photon is output to the periodic structure (10, 11, 12) to generate a plasmon. The reflected response beam (44) thus contains photons which are different in nature in comparison to the photons of the test light beam (45). Based on said discrepancy, a change in the periodic structure (10, 11, 12) can be recognized and thus the deflection or even a torque of the machine component (14) can be identified.