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1. (WO2015043228) AN AIR-BEARING ROTARY TABLE

Pub. No.:    WO/2015/043228    International Application No.:    PCT/CN2014/079317
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Sat Jun 07 01:59:59 CEST 2014
IPC: B23Q 16/10
F16C 32/06
B23Q 1/38
Applicants: GUANGZHOU HAOZHI INDUSTRIAL CO., LTD
广州市昊志机电股份有限公司
Inventors: TANG, Xiuqing
汤秀清
Title: AN AIR-BEARING ROTARY TABLE
Abstract:
An air-bearing rotary table comprises an air-bearing shaft (30) and an air-bearing sleeve (50). The air-bearing shaft (30) comprises a shaft (35), a top part (31) and a bottom part (32) provided on the two opposite ends of the shaft. The top part comprises an upper thrust face (310) opposite to the bottom part, and the bottom part comprises a lower thrust face (320) opposite to the top part. The air-bearing sleeve (50) comprises an upper air-bearing face (56) in the top part and a lower air-bearing face (57) in the bottom part. The upper air-bearing face (56) and the upper thrust face (310) are in clearance fit, and the lower air-bearing face (57) and the lower thrust face (320) are in clearance fit, and the inner surface (59) of the air-bearing sleeve and the outer surface of the shaft are in clearance fit. The upper air-bearing face (56), the lower air-bearing face (57) and the inner surface (59) of the air-bearing sleeve are provided with several gas vents (58) connected with external high pressure gas source. The air-bearing sleeve of the air-bearing rotary table is provided with two upper air-bearing faces and two lower air-bearing faces arranged opposite to each other, hence, the axial static stiffness and the rotational stiffness and the axial rotation accuracy of the air-bearing rotary table are enhanced, and the workpiece to be processed and detected locating thereon is always in a stable height, and it will be not changed due to changes of gas pressure.