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1. (WO2015043023) MANUFACTURING METHOD FOR TFT-LCD ARRAY SUBSTRATE, LIQUID CRYSTAL PANEL AND LIQUID CRYSTAL DISPLAY

Pub. No.:    WO/2015/043023    International Application No.:    PCT/CN2013/085597
Publication Date: Fri Apr 03 01:59:59 CEST 2015 International Filing Date: Tue Oct 22 01:59:59 CEST 2013
IPC: G02F 1/1368
G02F 1/1343
G02F 1/1333
Applicants: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
深圳市华星光电技术有限公司
Inventors: CHAI, Li
柴立
Title: MANUFACTURING METHOD FOR TFT-LCD ARRAY SUBSTRATE, LIQUID CRYSTAL PANEL AND LIQUID CRYSTAL DISPLAY
Abstract:
A manufacturing method for a TFT-LCD array substrate, which comprises the steps of: a) forming a grid electrode (22), a grid electrode insulation layer (23), an active layer, a source electrode (26a), a drain electrode (26b), a passivation layer (29) and a passivation layer via hole (28) located above the drain electrode (26b) on a glass substrate (21); b) depositing a conductive thin film on the glass substrate (21) after step a) is completed, and after exposure and development, removing the photoresist in a TFT region except at the location of the passivation layer via hole (28), and removing the part of the photoresist in the location of the pixel region where an interval is to be formed, thereby exposing the conductive film in the TFT region except at the location of the passivation layer via hole (28); c) by means of a fourth dry etching, removing the residual photoresist at the location where an interval (271) is to be formed, and exposing the conductive thin film in the position where the interval (271) is to be formed; d) by means of a third wet etching, removing the exposed conductive thin film; and e) peeling off the photoresist which has not been removed to form a conductive electrode (27), and connecting the conductive electrode (27) with the passivation layer via hole (28). Also provided are a liquid crystal panel and a liquid crystal display.