WIPO logo
Mobile | Deutsch | Español | Français | 日本語 | 한국어 | Português | Русский | 中文 | العربية |
PATENTSCOPE

Search International and National Patent Collections
World Intellectual Property Organization
Search
 
Browse
 
Translate
 
Options
 
News
 
Login
 
Help
 
Machine translation
1. (WO2015037748) HEAT TREATMENT DEVICE AND HEAT TREATMENT SYSTEM COMPRISING SAME
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2015/037748    International Application No.:    PCT/KR2013/008138
Publication Date: 19.03.2015 International Filing Date: 10.09.2013
IPC:
H01L 31/04 (2014.01), H01L 31/18 (2006.01)
Applicants: TERASEMICON CORPORATION [KR/KR]; 267-24 Gyeonggidong-ro Dongtan-myeon Hwaseong-si Gyeonggi-do 445-812 (KR)
Inventors: LEE, Byung Il; (KR).
LEE, Young Ho; (KR).
HUR, Kwan Sun; (KR)
Agent: SU INTELLECTUAL PROPERTY; 2F., 8, Nonhyeon-ro 101-gil Gangnam-gu Seoul 135-907 (KR)
Priority Data:
Title (EN) HEAT TREATMENT DEVICE AND HEAT TREATMENT SYSTEM COMPRISING SAME
(FR) APPAREIL DE TRAITEMENT THERMIQUE ET SYSTÈME DE TRAITEMENT THERMIQUE LE CONTENANT
(KO) 열처리 장치 및 이를 구비한 열처리 시스템
Abstract: front page image
(EN)A heat treatment device and a heat treatment system are disclosed. The heat treatment system according to the present invention has the advantage of reducing cost by forming a main body with a metal material which is relatively low-priced. Also, the concern for damage to an inner body is eliminated by forming the inner main body defining a chamber from a metal material, and gas in the chamber is prevented from leaking out by installing an outer main body so as to surround the inner main body. In addition, the temperature of the inner main body is relatively low compared to the temperature of the chamber, due to installing, inside the inner main body defining the chamber, a first heater which heats substrates. As a result, the inner main body is prevented from corrosion due to gas at a high temperature. In addition, the advantage of improving heating performance is provided by installing the first heater, for heating substrates, inside the inner main body. Also provided are the advantages of preventing condensation of gas on the inner surface of the inner main body by installing, on the outer surface of the inner main body, a second heater for heating the inner main body and a cooling pipe for cooling the inner main body, and of further preventing the inner main body from corrosion due to gas at a high temperature while so doing. Also, the substrates are loaded and stored on a boat, in a plurality, and multiple boats are loaded in the chamber, thus a large quantity of substrates can be treated at once. As a result, the advantage of improving productivity is provided.
(FR)L'invention concerne un appareil de traitement thermique et un système de traitement thermique. Le système de traitement thermique conforme à la présente invention a l'avantage de réduire les coûts par la formation d'un corps principal avec un matériau métallique qui est relativement économique. La préoccupation relative à l'endommagement d'un corps interne est aussi supprimée par la formation du corps principal interne définissant une chambre à partir d'un matériau métallique et l'on prévient les fuites du gaz présent dans la chambre par l'installation d'un corps principal externe de manière à entourer le corps principal interne. De plus, la température du corps principal interne est relativement basse par rapport à la température de la chambre, du fait de l'installation, à l'intérieur du corps principal interne définissant la chambre, d'un premier dispositif de chauffage qui chauffe les substrats. Ainsi, le corps principal interne est protégé de la corrosion due aux gaz à température élevée. De plus, l'avantage d'améliorer les performances de chauffage vient de l'installation du premier dispositif de chauffage à l'intérieur du corps principal interne. On obtient aussi les avantages d'empêcher la condensation de gaz sur la surface intérieure du corps principal interne par installation, sur la surface externe du corps principal interne, d'un deuxième dispositif de chauffage servant à chauffer le corps principal interne et d'un tuyau de refroidissement servant à refroidir le corps principal interne, et ce faisant par ailleurs, de prévention de la corrosion du corps principal interne due aux gaz à température élevée. Les substrats sont également chargés et stockés sur une nacelle, en une pluralité, et de multiples nacelles sont chargées dans la chambre, et ainsi une grande quantité de substrats peut être traitée en une fois. Ainsi, l'avantage d'amélioration de la productivité est ainsi obtenu.
(KO)열처리 장치 및 열처리 시스템이 개시된다. 본 발명에 따른 열처리 시스템은, 본체가 상대적으로 저가인 금속재로 형성되므로 원가가 절감되는 효과가 있다. 그리고, 챔버를 형성하는 내부본체가 금속재로 형성되므로, 내부본체가 파손될 우려가 없고, 내부본체를 감싸는 형태로 외부본체가 설치되므로, 챔버의 가스가 외부로 누설되는 것이 방지되는 효과가 있다. 그리고, 챔버를 형성하는 내부본체의 내부에 제1히터가 설치되어 기판을 가열하므로, 챔버의 온도에 비하여 내부본체의 온도가 상대적으로 낮다. 이로 인해, 고온에서 가스에 의하여 내부본체가 부식되는 것이 방지되는 효과가 있다. 또한, 내부본체의 내부에 제1히터가 설치되어 기판을 가열하므로, 가열 성능이 향상되는 효과가 있다. 그리고, 내부본체의 외면에는 내부본체를 가열하기 위한 제2히터 및 내부본체를 냉각시키기 위한 냉각관이 설치되므로, 내부본체의 내면에 가스가 응착되는 것을 방지할 수 있음과 동시에 내부본체가 고온에서 가스에 의하여 부식되는 것을 더욱 방지할 수 있는 효과가 있다. 그리고, 기판은 보트에 복수개 적재 보관되고, 복수의 보트가 챔버에 로딩되므로, 한번에 많은 수의 기판을 처리할 수 있다. 따라서, 생산성이 향상되는 효과가 있다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: Korean (KO)
Filing Language: Korean (KO)