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1. (WO2015030271) SAMPLE STAGE FOR MULTIPURPOSE THREE-DIMENSIONAL IMAGING AND PRECISION CONTROL DEVICE OF SAMPLE HOLDER IN TRANSMISSION ELECTRON MICROSCOPE
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2015/030271 International Application No.: PCT/KR2013/007700
Publication Date: 05.03.2015 International Filing Date: 28.08.2013
IPC:
H01J 37/20 (2006.01) ,H01J 37/26 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
20
Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
26
Electron or ion microscopes; Electron- or ion-diffraction tubes
Applicants: KOREA BASIC SCIENCE INSTITUTE[KR/KR]; 169-148, Gwahak-ro Yuseong-gu Daejeon 305-806, KR
Inventors: JEUNG, Jong-Man; KR
KIM, Jin-Gyu; KR
YOO, Seung-Jo; KR
WON, Jong-Han; KR
CHEON, Seong-Sik; KR
Agent: KIM, Wonjoon; 205 GoldVenture Tower, 66, Dunsan-daero 117beon-gil Seo-gu Daejeon 302-834, KR
Priority Data:
Title (EN) SAMPLE STAGE FOR MULTIPURPOSE THREE-DIMENSIONAL IMAGING AND PRECISION CONTROL DEVICE OF SAMPLE HOLDER IN TRANSMISSION ELECTRON MICROSCOPE
(FR) ÉTAGE D'ÉCHANTILLON POUR IMAGERIE TRIDIMENSIONNELLE MULTIUSAGE ET DISPOSITIF DE COMMANDE DE PRÉCISION D'UN PORTE-ÉCHANTILLON DANS UN MICROSCOPE ÉLECTRONIQUE À TRANSMISSION
(KO) 투과전자현미경에서의 다목적 3차원 이미징을 위한 시료스테이지 및 시료 홀더의 정밀제어장치
Abstract:
(EN) The present invention relates to a precision control device which can simultaneously drive a goniometer (x, y, z, α) and a double-tilting holder (β) for multipurpose three-dimensional imaging (atomic structure, electron diffraction, electron tomography and the like) of a nano-structure by using a transmission electron microscope (TEM). According to the present invention, the three-dimensional imaging (atomic structure, electron diffraction, electron tomography and the like) of the nano-structure can be rapidly and conveniently obtained by automatically adjusting an orientation of a sample within the TEM.
(FR) La présente invention porte sur un dispositif de commande de précision qui peut entraîner simultanément un goniomètre (x, y, z, α) et un support à double inclinaison (β) pour l'imagerie tridimensionnelle multiusage (structure atomique, diffraction électronique, tomographie électronique et similaires) d'une nanostructure au moyen d'un microscope électronique à transmission (MET). Selon la présente invention, l'imagerie tridimensionnelle (structure atomique, diffraction électronique, tomographie électronique et similaire) de la nanostructure peut être obtenue de manière rapide et pratique en réglant automatiquement une orientation d'un échantillon dans le MET.
(KO) 본 발명은 투과전자현미경(TEM : Transmission Electron Microscope)을 이용하여 나노구조체의 다목적 3차원 이미징(원자구조, 전자회절, 전자토모그래피 등)을 위한 고니오메터(goniometer; x, y, z, α)와 double-tilting holder(β)를 동시에 구동할 수 있는 정밀제어장치에 관한 것으로, 본 발명에 의하면 전자현미경내에서 시료의 방위를 자동으로 조정하여 나노구조체의 3차원 이미징(원자구조, 전자회절, 전자토모그래피 등)을 신속하고 간편하게 획득할 수 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)