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1. (WO2014208789) THIN FILM DEPOSITION DEVICE PROVIDED WITH SUPPLY UNIT

Pub. No.:    WO/2014/208789    International Application No.:    PCT/KR2013/005682
Publication Date: Thu Jan 01 00:59:59 CET 2015 International Filing Date: Fri Jun 28 01:59:59 CEST 2013
IPC: H01L 51/56
H01L 31/02
Applicants: SNU PRECISION CO., LTD.
에스엔유 프리시젼 주식회사
Inventors: Oh, Hyun Pil
오현필
Jeon, Kwang Jin
전광진
Park, Sang Hyun
박상현
Oh, Kyu Woon
오규운
Han, Chanhee
한찬희
LEE, Il Hwan
이일환
Title: THIN FILM DEPOSITION DEVICE PROVIDED WITH SUPPLY UNIT
Abstract:
The present invention relates to a thin film deposition device provided with a supply unit. The thin film deposition device comprises: a supply unit for supplying raw materials; a gasification unit for gasifying the raw materials supplied from the supply unit; and a spray unit for spraying the raw materials gasified in the gasification unit at a substrate. The supply unit comprises: an injection part for continuously injecting the raw material; a conveying part connected to the injection part, having a filling groove, which is filled with the raw material, spirally formed along the outer peripheral surface thereof and conveying the filled raw material along the longitudinal direction thereof by rotation; a discharge part supplied with the raw material from the conveying part to transmit the same to the gasification unit side; a housing part for receiving the conveying part and having connection grooves respectively connected to the injection part and the discharge part; and a motor part connected to the conveying unit and rotating the conveying part such that the raw material filled in the filling groove is conveyed to the discharge part.