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1. (WO2014207709) CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2014/207709 International Application No.: PCT/IB2014/062649
Publication Date: 31.12.2014 International Filing Date: 27.06.2014
Chapter 2 Demand Filed: 27.04.2015
IPC:
G01P 15/125 (2006.01) ,G01P 15/18 (2013.01) ,G01P 15/08 (2006.01)
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
125
by capacitive pick-up
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
18
in two or more dimensions
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
Applicants: MURATA MANUFACTURING CO., LTD.[JP/JP]; 10-1, Higashikotari 1-chome Nagaokakyo-shi Kyoto, 617-8555, JP
Inventors: LIUKKU, Matti; FI
RYTKÖNEN, Ville-Pekka; FI
BLOMQVIST, Anssi; FI
Priority Data:
2013571428.06.2013FI
Title (EN) CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR
(FR) CAPTEUR D'ACCÉLÉRATION MICROMÉCANIQUE CAPACITIF
Abstract:
(EN) The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor (2), a second sensor (4), and a third sensor (5). The first sensor (2) comprises a rotor electrode (6) and stator electrode (7). The sensor comprises a first beam (8) that is connected to a rotor electrode support structure (19) and that is connected to the rotor electrode (6). The sensor comprises a second beam (12) that is connected to the rotor electrode support structure (19) and that is connected to the rotor electrode (6). The second sensor (4) is situated in a first space (17) circumscribed by the first beam (8), the first sensor (2), and the rotor electrode support structure (19).The third sensor (5) is situated in a second space (18) circumscribed by the second beam (12), the first sensor (2), and the rotor electrode support structure (19).
(FR) L'invention concerne un capteur d'accélération micromécanique capacitif, comportant un premier capteur (2), un deuxième capteur (4) et un troisième capteur (5). Le premier capteur (2) comporte une électrode de rotor (6) et une électrode de stator (7). Le capteur comporte un premier montant (8) qui est relié à une structure formant support (19) d'électrode de rotor et qui est relié à l'électrode de rotor (6). Le capteur comporte un second montant (12) qui est relié à la structure formant support (19) d'électrode de rotor et qui est relié à l'électrode de rotor (6). Le deuxième capteur (4) est situé dans un premier espace (17) délimité par le premier montant (8), le premier capteur (2) et la structure formant support (19) d'électrode de rotor. Le troisième capteur (5) est situé dans un second espace (18) délimité par le second montant (12), le premier capteur (2) et la structure formant support (19) d'électrode de rotor.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)