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1. (WO2014206706) RADIATION SOURCE FOR AN EUV OPTICAL LITHOGRAPHIC APPARATUS, AND LITHOGRAPHIC APPARATUS COMPRISING SUCH A RADIATION SOURCE
Latest bibliographic data on file with the International Bureau   

Pub. No.:    WO/2014/206706    International Application No.:    PCT/EP2014/061710
Publication Date: 31.12.2014 International Filing Date: 05.06.2014
IPC:
G03F 7/20 (2006.01), H05G 2/00 (2006.01)
Applicants: ASML NETHERLANDS B.V. [NL/NL]; De Run 6501 NL-5504 DR Veldhoven (NL)
Inventors: FRANKEN, Johannes; (NL)
Agent: SLENDERS, Peter; P.O. Box 324 NL-5500 AH Veldhoven (NL)
Priority Data:
61/840,878 28.06.2013 US
Title (EN) RADIATION SOURCE FOR AN EUV OPTICAL LITHOGRAPHIC APPARATUS, AND LITHOGRAPHIC APPARATUS COMPRISING SUCH A RADIATION SOURCE
(FR) SOURCE DE RAYONNEMENT POUR UN APPAREIL DE LITHOGRAPHIE OPTIQUE PAR ULTRAVIOLETS EXTRÊMES, ET APPAREIL DE LITHOGRAPHIE COMPRENANT UNE TELLE SOURCE DE RAYONNEMENT
Abstract: front page image
(EN)A radiation source generates extreme ultraviolet radiation. The radiation source comprises a plasma formation site located at a position in which a fuel will be contacted by a beam of radiation to form a plasma. A receiving structure is provided to trap debris particles on its surface that are generated with the formation of the plasma. The receiving structure has a rod-shaped heater element for heating the receiving surface, the device preventing large droplets of fuel from forming on the receiving surface. Instead, the trapped fuel is melted off the receiving surface.
(FR)Une source de rayonnement génère un rayonnement dans l’ultraviolet extrême. La source de rayonnement comprend un site de formation de plasma occupant une position où un faisceau de rayonnement entrera au contact d’un combustible pour former un plasma. Une structure réceptrice est utilisée pour piéger à sa surface les débris particulaires issus de la formation du plasma. La structure réceptrice comprend un élément chauffant en forme de tige servant à chauffer la surface réceptrice dans le but d’y empêcher la formation de grosses gouttelettes de combustible. Le combustible piégé est ainsi éliminé de la surface réceptrice par fusion.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)