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1. (WO2014206599) FORMULATIONS FOR PRODUCING INDIUM OXIDE-CONTAINING LAYERS, METHODS FOR PRODUCING SAID LAYERS AND THE USE THEREOF

Pub. No.:    WO/2014/206599    International Application No.:    PCT/EP2014/058615
Publication Date: Thu Jan 01 00:59:59 CET 2015 International Filing Date: Tue Apr 29 01:59:59 CEST 2014
IPC: C07F 5/00
C23C 18/12
H01L 21/285
Applicants: EVONIK DEGUSSA GMBH
STEIGER, Jürgen
MERKULOV, Alexey
HOPPE, Arne
Inventors: STEIGER, Jürgen
MERKULOV, Alexey
HOPPE, Arne
Title: FORMULATIONS FOR PRODUCING INDIUM OXIDE-CONTAINING LAYERS, METHODS FOR PRODUCING SAID LAYERS AND THE USE THEREOF
Abstract:
The present invention relates to liquid formulations which can be obtained by dissolving at least one indium alkoxide compound in at least one solvent, said indium alkoxide compound being produced by reacting indium trihalide InX3, wherein X = F, Cl, Br, I, with a secondary amine of formula R'2NH, wherein R' = alkyl, in a molar ratio of 8:1 to 20:1 relative to the indium trihalide in the presence of an alcohol of the generic formula ROH, wherein R = alkyl. The invention further relates to methods for producing said liquid formulations, to the use thereof for producing indium oxide-containing or (semi-)conducting layers, and to methods for producing indium oxide-containing layers, using said formulations.