Search International and National Patent Collections

1. (WO2014201032) HIGH FLOW PIEZO TYPE VALVE

Pub. No.:    WO/2014/201032    International Application No.:    PCT/US2014/041762
Publication Date: Fri Dec 19 00:59:59 CET 2014 International Filing Date: Wed Jun 11 01:59:59 CEST 2014
IPC: H01L 41/00
Applicants: ILLINOIS TOOL WORKS INC.
Inventors: SHIREY, Scott
DYMEK, Andrew
Title: HIGH FLOW PIEZO TYPE VALVE
Abstract:
The disclosed embodiments include a piezo valve for both high and low flow mass flow controllers. This style valve utilizes a piezo stack for controlling flow by deflecting a valve seat upwards from its sealed seated position over an orifice of known diameter in a controlled fashion. Due to its inherent limitations, a piezo stack can generate a large force, but with a small displacement. In order to develop high flows within the valve, the disclosed embodiments include a stroke multiplier or amplifier for increasing a displacement of the valve seat to increase flow through the valve assembly by increasing the ratio of movement of the piezo stack to a deflection of the valve seat.