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1. (WO2014199869) INFRARED INSPECTION DEVICE
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Pub. No.:
WO/2014/199869
International Application No.:
PCT/JP2014/064688
Publication Date:
18.12.2014
International Filing Date:
03.06.2014
IPC:
G01N 25/72
(2006.01),
G01J 5/10
(2006.01),
G01J 5/48
(2006.01)
G
PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
25
Investigating or analysing materials by the use of thermal means
72
Investigating presence of flaws
G
PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
5
Radiation pyrometry
10
using electric radiation detectors
G
PHYSICS
01
MEASURING; TESTING
J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
5
Radiation pyrometry
48
using wholly visual means
Applicants:
HITACHI HIGH-TECHNOLOGIES CORPORATION
[JP/JP]; 24-14, Nishi-Shimbashi 1-chome, Minato-ku, Tokyo 1058717 (JP)
Inventors:
YOSHITAKE, Yasuhiro
; (JP).
SASAZAWA, Hideaki
; (JP)
Agent:
TSUTSUI, Yamato
; Tsutsui & Associates, 3F, Shinjuku Gyoen Bldg., 3-10, Shinjuku 2-chome, Shinjuku-ku, Tokyo 1600022 (JP)
Priority Data:
2013-123696
12.06.2013
JP
Title
(EN)
INFRARED INSPECTION DEVICE
(FR)
DISPOSITIF D'INSPECTION PAR INFRAROUGE
(JA)
赤外線検査装置
Abstract:
(EN)
A technology is provided that is capable of enhancing, in measurements and inspections using infrared radiation, the accuracy of temperature-difference measurements near the surface of a structure and the accuracy of inspections of the status of defects, deterioration, and the like. An inspection device (1A) has a pulsed laser (2) for irradiating a pulsed laser onto a subject (5); a scanning mirror (23) for scanning the subject (5); an infrared sensor (3) for detecting infrared radiation originating from the subject (5); a control unit (11A) for controlling the irradiation of the pulsed laser (2), the angle of the scanning mirror (23), and the detection of the infrared sensor (3) so that the temperature variation corresponding to the irradiation and non-irradiation of the laser light is measured multiple times for each measured point; an image generation unit (12A) for generating an image including the temperature difference distribution of the area of the subject (5) on the basis of the measured temperature difference values and the scanning mirror angles; and a defect extraction unit (13A) for identifying and extracting defective or degraded portions using the image.
(FR)
L'invention concerne une technologie permettant d'augmenter, dans des mesures et des inspections qui utilisent le rayonnement infrarouge, la précision de mesures de différence de la température à proximité de la surface d'une structure et la précision d'inspections de l'état de défauts, de détérioration et analogue. Un dispositif d'inspection (1A) présente un laser pulsé (2) pour irradier un laser pulsé sur un sujet (5) ; un miroir de balayage (23) pour balayer le sujet (5) ; un capteur d'infrarouge (3) pour détecter le rayonnement infrarouge provenant du sujet (5) ; une unité de commande (11A) pour commander l'irradiation du laser pulsé (2), l'angle du miroir de balayage (23) et la détection du capteur d'infrarouge (3) de telle sorte que la variation de température correspondant à l'irradiation et à la non-irradiation de la lumière laser est mesurée de nombreuses fois pour chaque point mesuré ; une unité de génération d'image (12A) pour générer une image incluant la distribution des différences de température de la zone du sujet (5) sur base des valeurs de différences de température mesurées et des angles du miroir de balayage ; et une unité d'extraction de défauts (13A) pour identifier et extraire les parties défectueuses ou dégradées à l'aide de l'image.
(JA)
赤外線を用いた計測及び検査に関し、構造物の表面付近における温度差の計測の精度、及び欠陥や劣化等の状態の検査の精度を向上させることができる技術を提供する。検査装置1Aは、対象物5に対しパルス状のレーザを照射するパルスレーザ2と、対象物5上を走査するための走査ミラー23と、対象物5から生じる赤外線を検出する赤外線センサ3と、被計測点ごとにレーザ光の照射有無に応じた温度差の計測を複数回行うように、パルスレーザ2の照射、走査ミラー23の角度、及び赤外線センサ3の検出を制御する制御部11Aと、温度差の計測値及び走査ミラーの角度に基づき、対象物5の領域の温度差の分布を含む画像を生成する画像生成部12Aと、画像を用いて欠陥または劣化の部分を判定して抽出する欠陥抽出部13Aとを有する。
Designated States:
AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language:
Japanese (
JA
)
Filing Language:
Japanese (
JA
)