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1. (WO2014199820) METHOD AND DEVICE FOR LINE PATTERN SHAPE EVALUATION

Pub. No.:    WO/2014/199820    International Application No.:    PCT/JP2014/064006
Publication Date: Fri Dec 19 00:59:59 CET 2014 International Filing Date: Wed May 28 01:59:59 CEST 2014
IPC: G01B 15/00
G01B 15/04
H01L 21/66
Applicants: HITACHI HIGH-TECHNOLOGIES CORPORATION
株式会社日立ハイテクノロジーズ
Inventors: YAMAGUCHI Atsuko
山口 敦子
KAWADA Hiroki
川田 洋揮
Title: METHOD AND DEVICE FOR LINE PATTERN SHAPE EVALUATION
Abstract:
The present invention pertains to a method and device for quantitatively evaluating the degree and characteristics of wiggling, which is a phenomenon that occurs in electronic device fabrication processes and consists of the deformation in the same shape of the left and right edges of fine line patterns, and takes advantage of the fact that this wiggling is included in measured values for line edge variation but not line width variation by acquiring the differences between these values. Further, the present invention is configured so as to calculate line center positions and use the distribution of the deviation from the average line center position as an indicator. Additionally, the present invention is configured to quantify wiggling characteristics by outputting a coefficient of wiggling correlation between lines or a wiggling component synchronized between lines as an indicator.