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1. (WO2014198497) METHOD FOR DISSOLVING CHALCOGEN ELEMENTS AND METAL CHALCOGENIDES IN NON-HAZARDOUS SOLVENTS
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2014/198497 International Application No.: PCT/EP2014/060232
Publication Date: 18.12.2014 International Filing Date: 19.05.2014
IPC:
C01B 19/00 (2006.01) ,C01G 3/00 (2006.01) ,C01G 15/00 (2006.01) ,H01L 21/02 (2006.01)
C CHEMISTRY; METALLURGY
01
INORGANIC CHEMISTRY
B
NON-METALLIC ELEMENTS; COMPOUNDS THEREOF
19
Selenium; Tellurium; Compounds thereof
C CHEMISTRY; METALLURGY
01
INORGANIC CHEMISTRY
G
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F94
3
Compounds of copper
C CHEMISTRY; METALLURGY
01
INORGANIC CHEMISTRY
G
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F94
15
Compounds of gallium, indium, or thallium
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
02
Manufacture or treatment of semiconductor devices or of parts thereof
Applicants: IMEC VZW[BE/BE]; Kapeldreef 75 B-3001 Leuven, BE
KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&D[BE/BE]; Waaistraat 6 bus 5105 B-3000 Leuven, BE
Inventors: ESMAEIL ZAGHI, Armin; BE
VLEUGELS, Jozef Petrus Coleta; BE
Agent: BIRD GOËN & CO; Gaston Geenslaan 9 B-3001 Heverlee, BE
Priority Data:
13171384.411.06.2013EP
Title (EN) METHOD FOR DISSOLVING CHALCOGEN ELEMENTS AND METAL CHALCOGENIDES IN NON-HAZARDOUS SOLVENTS
(FR) PROCÉDÉ DE DISSOLUTION D'ÉLÉMENTS CHALCOGÈNES ET DE CHALCOGÉNURES MÉTALLIQUES DANS DES SOLVANTS NON DANGEREUX
Abstract:
(EN) The present disclosure provides a method of preparing a chalcogen containing solution that is hydrazine free and hydrazinium free, wherein the method comprises: providing a predetermined amount of elemental chalcogen; providing a predetermined amount of elemental sulfur; providing an amine solvent; and combining the predetermined amount of elemental chalcogen and the predetermined amount of elemental sulfur in the amine solvent, thereby dissolving the elemental chalcogen and the elemental sulfur in the amine solvent. The chalcogen containing solution can advantageously be used as a precursor for the formation of a chalcogen containing layer on a substrate.
(FR) La présente invention concerne un procédé de préparation d'une solution contenant un chalcogène exempte d'hydrazine et exempte d'hydrazinium, le procédé consistant à : fournir une quantité prédéterminée de chalcogène élémentaire ; fournir une quantité prédéterminée de soufre élémentaire ; fournir un solvant aminé ; et combiner la quantité prédéterminée de chalcogène élémentaire et la quantité prédéterminée de soufre élémentaire dans le solvant aminé, dissolvant ainsi le chalcogène élémentaire et le soufre élémentaire dans le solvant aminé. La solution contenant un chalcogène peut avantageusement être utilisée comme précurseur pour la formation d'une couche contenant un chalcogène sur un substrat.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)