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1. (WO2014197814) SYSTEM, METHOD AND APPARATUS FOR POLARIZATION CONTROL

Pub. No.:    WO/2014/197814    International Application No.:    PCT/US2014/041330
Publication Date: Fri Dec 12 00:59:59 CET 2014 International Filing Date: Sat Jun 07 01:59:59 CEST 2014
IPC: G02F 1/01
H01L 21/66
Applicants: KLA-TENCOR CORPORATION
Inventors: MALEEV, Ivan
PETTIBONE, Donald
Title: SYSTEM, METHOD AND APPARATUS FOR POLARIZATION CONTROL
Abstract:
A polarization control device includes a first wave plate having a first surface profile and a second wave plate having a second surface profile complimentary to the first surface profile. The optical axis of the first wave plate is orthogonal to the optical axis of the second wave plate. The first wave plate and the second wave plate are positioned to align the first surface profile with the second surface profile and maintain a constant thickness across the polarization control device. The first wave plate and the second wave plate may control polarization rotation as a continuous function of transverse position across a pupil plane of an optical system. The first wave plate and the second wave plate are separated by a sufficiently small distance so as to limit wave front distortion below a selected level.