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1. (WO2014197803) METHODS FOR THE DEPOSITION OF MANGANESE-CONTAINING FILMS USING DIAZABUTADIENE-BASED PRECURSORS

Pub. No.:    WO/2014/197803    International Application No.:    PCT/US2014/041313
Publication Date: Fri Dec 12 00:59:59 CET 2014 International Filing Date: Sat Jun 07 01:59:59 CEST 2014
IPC: C23C 16/34
C23C 16/44
Applicants: APPLIED MATERIALS, INC.
THOMPSON, David
ANTHIS, Jeffrey W.
Inventors: THOMPSON, David
ANTHIS, Jeffrey W.
Title: METHODS FOR THE DEPOSITION OF MANGANESE-CONTAINING FILMS USING DIAZABUTADIENE-BASED PRECURSORS
Abstract:
Methods and precursors are provided for deposition of films comprising manganese on surfaces using metal coordination complexes comprising a diazabutadiene-based ligand. Certain methods comprise exposing a substrate surface to a manganese precursor, and exposing the substrate surface to a tertiary amine.