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1. (WO2014196221) ANGULAR VELOCITY SENSOR
Latest bibliographic data on file with the International Bureau   

Pub. No.: WO/2014/196221 International Application No.: PCT/JP2014/052202
Publication Date: 11.12.2014 International Filing Date: 31.01.2014
IPC:
G01C 19/5762 (2012.01) ,B81B 3/00 (2006.01) ,G01C 19/5747 (2012.01) ,H01L 29/84 (2006.01)
G PHYSICS
01
MEASURING; TESTING
C
MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5719
using planar vibrating masses driven in a translation vibration along an axis
5733
Structural details or topology
5755
the devices having a single sensing mass
5762
the sensing mass being connected to a driving mass, e.g. driving frames
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
G PHYSICS
01
MEASURING; TESTING
C
MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5719
using planar vibrating masses driven in a translation vibration along an axis
5733
Structural details or topology
574
the devices having two sensing masses in anti-phase motion
5747
each sensing mass being connected to a driving mass, e.g. driving frames
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29
Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66
Types of semiconductor device
84
controllable by variation of applied mechanical force, e.g. of pressure
Applicants: HITACHI AUTOMOTIVE SYSTEMS, LTD.[JP/JP]; 2520, Takaba, Hitachinaka-shi, Ibaraki 3128503, JP
Inventors: JEONG, Heewon; JP
HAYASHI, Masahide; JP
YAMANAKA, Kiyoko; JP
Agent: INOUE, Manabu; c/o HITACHI, LTD., 6-1, Marunouchi 1-chome, Chiyoda-ku, Tokyo 1008220, JP
Priority Data:
2013-12073807.06.2013JP
Title (EN) ANGULAR VELOCITY SENSOR
(FR) CAPTEUR DE VITESSE ANGULAIRE
(JA) 角速度センサ
Abstract:
(EN) Provided is a multi-axis angular velocity sensor configured so that control circuits are simplified, manufacturing steps are simplified, and so that the sensor is unlikely to suffer from fluctuations in characteristics arising due to fluctuations in the surrounding environment. A mass body (MS), a Coriolis element (CE1), and a Coriolis element (CE2) are formed in the same device layer. The device layer is disposed above the front surface of the substrate so as to be parallel with the back surface of the substrate. The mass body (MS) has a first portion (P1) which extends in an excitation direction, a second portion (P2) which is spaced apart from the first portion (P1) and extends in the excitation direction, and a connection section (CU) for linking the first portion (P1) and second portion (P2). In plan view, the Coriolis element (CE1) and the Coriolis element (CE2) are disposed so as to sandwich the connection section (CU).
(FR) La présente invention concerne un capteur multi-axe de vitesse angulaire dont les circuits de commande et les étapes de fabrication sont simplifiés et dont les caractéristiques sont moins susceptibles de varier à cause des fluctuations de l'environnement. Un corps de masse (MS), un élément de Coriolis (CE1) et un élément de Coriolis (CE2) sont formés dans une même couche de dispositif. La couche de dispositif est disposée au-dessus de la surface avant d'un substrat de manière être parallèle à la surface arrière du substrat. Le corps de masse (MS) possède une première partie (P1) qui s'étend dans une direction d'excitation, une seconde partie (P2) qui est séparée de la première partie (P1) et qui s'étend dans la direction d'excitation, et une section connexion (CU) servant à relier la première partie (P1) et la seconde partie (P2). Dans une vue en plan, l'élément de Coriolis (CE1) et l'élément de Coriolis (CE2) sont disposés de manière à prendre en sandwich la section connexion (CU).
(JA)  多軸の角速度センサに着目して、制御回路の簡素化や製造工程の簡素化や周辺環境の変動に起因する特性変動を受けにくい多軸の角速度センサを提供する。 質量体MSとコリオリ素子CE1とコリオリ素子CE2は、同一のデバイス層に形成され、デバイス層は、基板の裏面と並行するように、基板の表面の上方に配置されている。さらに、質量体MSは、励振方向に延在する第1部位P1、第1部位P1と離間しながら励振方向に延在する第2部位P2、第1部位P1と第2部位P2とを連結する接続部CUを含み、平面視において、コリオリ素子CE1とコリオリ素子CE2は、接続部CUを挟むように配置されている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)